The P-Series represents a productline of peltier-based thermal chuck systems for a temperature range between -65C up to +150C.


Key facts:

·  High performant, exceptional temperature uniformity

·  High isolation for low leakage (femto-amp level), low capacitance test measurements

·  Fully integrated for 200 and 300 mm prober systems, 6 inch on request

·  Available for all major wafer probing stations, laser trimmers
   and inspection stations

·  Standard or PC- based control unit

·  Different high performant chillers for various temperature requirements

·  Modular combination with nearly all P-Series products

·  Handling system on request

Datasheet P200   Datasheet P300
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