Temperature Range -40C to +150C  
Extended Temperature Range -65C to +150C  
Temperature Stability 0,1C  
Temperature Accuracy 0,5C  
Heating Rates +25C to +150C <10min
  -40C to +25C <3min
Cooling Rates +25C to -40C <15min
  +150C to +25C <5min
Chuck Diameter 205mm  
Temperature Uniformity -40C to +150C < 0,8K/ 0,8%
Flatness / Paralellism < 10m  
Isolation >0,5 TOHM at 25°C
Capacitance 600pF Standard
Interface RS 232 Standard
  IEEE 488 optional
Chuck Dimensions Diameter 210mm
  Height 32mm
  Weight 3250g
Dimensions Controller 250mm x 480mm x 120mm or individual
Deviations in the technical data can occur
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