The perfect system for high power applications with an extraordinary performance at a wide temperature range between - 65°C and + 300°C.

Each system contains a high performant liquid-cooling unit. The optional Dry Air Kit and the Dew Point Control, which are available for the major prober systems, enable moisture free testing at lowest temperatures.

Key facts:

·  High power at lowest temperatures

·  Wide temperature range

·  Fully integrated for 200 and 300 mm prober systems

·  High isolation for low leakage (femto-amp level), low capacitance test    measurements

·  Tri-axial configuration is standard for all chuck systems of the M-Series

·  Available for all major wafer probing stations, laser trimmers and inspection stations

·  Standard control unit or customized

·  Different high performant chillers for various temperature requirements

·  Modular combination with nearly all M-Series products

·  Optional high voltage model (max. 6 KV)


Datasheet M200   Datasheet M300

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