Temperature Range -40C to +200C  
Extended Temperature Range -60C to +300C  
Temperature Stability 0,1C  
Temperature Accuracy 0,5C  
Heating Rates +25C to +200C <15min
  -40C to +25C <6min
Cooling Rates +25C to -40C <15min
  +200C to +25C <15min
Chuck Diameter 305mm  
Temperature Uniformity -60C to +100C < 0,5K
  +100C to +200C < 0,5%
Flatness / Paralellism < 5m  
Isolation >2,0TOHM at 25°C
Capacitance 1600pF Standard
  200pF triaxial connected
Interface RS232 Standard
  IEEE488 optional
Chuck Dimensions Diameter 305mm
  Height 40mm
  Weight 8850g
Dimensions Controller 250mm x 480mm x 120mm or individual
Deviations in the technical data can occur
contact us by email or phone +49-89-89.94.82 0
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