Temperature Range -40C to +200C  
Extended Temperature Range -60C to +300C  
Temperature Stability 0,1C  
Temperature Accuracy 0,5C  
Heating Rates +25C to +200C <8min
  -60C to +25C <4min
Cooling Rates +25C to -60C <8min
  +200C to +25C <6min
Chuck Diameter 205mm  
Temperature Uniformity -60C to +100C < 0,5K
  +100C to +200C < 0,5%
Flatness / Paralellism < 5m  
Isolation >2,0TOHM at 25°C
Capacitance 800pF Standard
  200pF triaxial connected
Interface RS232 Standard
  IEEE488 optional
Chuck Dimensions Diameter 205mm
  Height 32mm
  Weight 4250g
Dimensions Controller 250mm x 480mm x 120mm or individual
Deviations in the technical data can occur
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