Temperature Range +25C to +200C  
Extended Temperature Range -30°C to +400C  
Temperature Stability 0,1C  
Temperature Accuracy 0,5C  
Heating Rates +25C to +200C <10min
  -10C to +25C <2min
Cooling Rates +25C to -10C <7min
  +200C to +25C <8min
Chuck Diameter 205mm  
Temperature Uniformity -30C to +100C < 0,5K
  +100C to +400C < 0,5%
Flatness / Paralellism < 8m  
Isolation >2TOHM at 25°C
Capacitance 1000pF Standard
  100pF triaxial connected
Interface RS232 Standard
  IEEE488 optional
Chuck Dimensions Diameter 205mm
  Height 28mm
  Weight 2750g
Dimensions Controller 250mm x 480mm x 120mm or individual
Deviations in the technical data can occur
contact us by email or phone +49-89-89.94.82 0
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